300 mm tool automation and its impact on fab design and OEE

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1996, Pages 156-161

  Weiss, Mitchell ^a  

^a PRI Automation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; AUTOMATION; MATERIALS HANDLING; PRODUCT DESIGN; PRODUCTIVITY; RELIABILITY;

FAB DESIGN; MANUFACTURING LEAD TIME; OVERALL EQUIPMENT EFFECTIVENESS; OVERALL FAB EFFECTIVENESS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030407968     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)