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Volumn 19, Issue 4, 1996, Pages
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Implications of 300 mm for fab design and automation
a
a
CAVLON Assoc
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(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
AUTOMATION;
CLEAN ROOMS;
DESIGN;
ELECTRONICS PACKAGING;
LITHOGRAPHY;
MAINTENANCE;
MATERIALS HANDLING;
OPTIMIZATION;
SEMICONDUCTOR DEVICE MANUFACTURE;
AUTOMATED MATERIAL HANDLING SYSTEMS;
BOXED CASSETTES;
CLEANROOM SIZE REDUCTION;
DIE EFFECTIVENESS;
WAFER CARRIER;
SILICON WAFERS;
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EID: 0030128493
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (2)
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References (5)
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