300 mm fab design - a total factory perspective

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 1997, Pages

  Plata, John J ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY MACHINES; FACTORY AUTOMATION; MATERIALS HANDLING; PLANT LAYOUT; PRODUCTION ENGINEERING; SILICON WAFERS;

WAFER HANDLING SCHEME;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031363729     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)