A high-fidelity, web-based simulator for 300mm wafer fabs

Proceedings of the IEEE International Conference on Systems, Man and Cybernetics

Volumn 2, Issue , 2001, Pages 1288-1293

  Kim, Hansoo ^a   Park, Jonghun ^a   Sohn, Sugje ^a   Wang, Ying ^a   Reveliotis, Spyros ^a   Zhou, Chen ^a   Bodner, Douglas ^a   McGinnis, Leon ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

300mm water fabs; Distributed simulation; High fidelity simulation; Rapid prototyping; VRML animation; Web based simulation

Indexed keywords

COMPUTER SIMULATION; PRODUCTIVITY; RAPID PROTOTYPING; SEMICONDUCTOR DEVICE MANUFACTURE; SYNCHRONIZATION; VIRTUAL REALITY; VISUALIZATION;

DISTRIBUTED SIMULATION; HIGH FIDELITY SIMULATION;

WORLD WIDE WEB;

EID: 0035723468     PISSN: 08843627     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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