Fab design for 300 mm wafer handling

European semiconductor

Volumn 20, Issue 5, 1998, Pages 25-27

  Colvin, Theron D ^a   Jones, Anthony R ^a   Hennessy, Lawrence S ^a   Mackulak, Gerald T ^a  

^a Automation Planning and Design Group   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONCURRENT ENGINEERING; DATA ACQUISITION; DATA REDUCTION; FACTORY AUTOMATION; MATERIALS HANDLING; SEMICONDUCTOR DEVICE MANUFACTURE;

AUTOMATIC MATERIAL HANDLING SYSTEMS (AMHS); SEMICONDUCTOR WAFER FABRICATION;

SILICON WAFERS;

EID: 0032073269     PISSN: 09575685     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)