Interpretation of ion-channeling spectra in ion-implanted Si with models of structurally relaxed point defects and clusters

Physical Review B - Condensed Matter and Materials Physics

Volumn 69, Issue 16, 2004, Pages

  Lulli, Giorgio ^a   Albertazzi, Eros ^a   Bianconi, Marco ^a   Satta, Alessandra ^a   Balboni, Simone ^b   Colombo, Luciano ^c  

^a CNR   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

^c UNIVERSITY OF CAGLIARI   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON;

ANISOTROPY; ARTICLE; CRYSTAL; IRRADIATION; MATHEMATICAL ANALYSIS; MEASUREMENT; MODEL; MONTE CARLO METHOD;

EID: 45849155088     PISSN: 01631829     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevB.69.165216     Document Type: Article

References (33)

1. L.C. Feldman, J.M. Mayer, and S.T. Picraux, Material Analysis by Ion Channeling (Academic Press, New York, 1982).
2. J.H. Barrett, Phys. Rev. B 3, 1527 (1971).
3. P.J.M. Smulders and D.O. Boerma, Nucl. Instrum. Methods Phys. Res. B 29, 471 (1987).
4. B. Weber, E. Wendler, K. Gärtner, D.M. Stock, and W. Wesch, Nucl. Instrum. Methods Phys. Res. B 118, 113 (1996).
5. E. Albertazzi, M. Bianconi, G. Lulli, R. Nipoti, and M. Cantiano, Nucl. Instrum. Methods Phys. Res. B 118, 128 (1996).
6. G. Götz and G. Sommer, Radiat. Eff. 41, 195 (1979).
7. K. Morita and D. Carstasnjen, Radiat. Eff. 59, 117 (1981).
8. G. Hobler, Nucl. Instrum. Methods Phys. Res. B 96, 155 (1995).
9. G. Otto, G. Hobler, and K. Gärtner, Nucl. Instrum. Methods Phys. Res. B 202, 114 (2003).
10. S. Balboni, E. Albertazzi, M. Bianconi, and G. Lulli, Phys. Rev. B 66, 045202 (2002).
11. G. Lulli, E. Albertazzi, M. Bianconi, and S. Balboni, Nucl. Instrum. Methods Phys. Res. B 211, 50 (2003).
12. M. Bianconi, E. Albertazzi, S. Balboni, and G. Lulli, Nuc. Instrum. Methods Phys. Res. B (to be published).
13. P. Sigmund, Appl. Phys. Lett. 14, 114 (1969).
14. G. Lulli, M. Bianconi, A. Parisini, S. Sama, and M. Servidori, J. Appl. Phys. 88, 3993 (2000).
15. M. Lannoo and J. Bourgoin, Point Defects in Semiconductors (I) (Springer-Verlag, Berlin, 1981).
16. G. Lulli, E. Albertazzi, M. Bianconi, G.G. Bentini, and R. Lotti, Nucl. Instrum. Methods Phys. Res. B 170, 1 (2000).
17. L. Colombo, Annu. Rev. Mater. Res. 32, 271 (2002).
18. N. Arai, S. Takeda, and M. Kohyama, Phys. Rev. Lett. 78, 4265 (1997).
19. M. Kohyama and S. Takeda, Phys. Rev. B 60, 8075 (1999).
20. B.J. Coomer, J.P. Goss, R. Jones, S. Öberg, and P.R. Briddon, J. Phys.: Condens. Matter 13, L1 (2001).
21. D. Pierreux and A. Stesmans, Phys. Rev. B 68, 193208 (2003).
22. S. Balboni, Ph.D. thesis, University of Bologna, Bologna, Italy, 2002.
23. M.Z. Bazant, E. Kaxiras, and J.F. Justo, Phys. Rev. B 56, 8542 (1997).
24. J.F. Justo, M.Z. Bazant, E. Kaxiras, V.V. Bulatov, and S. Yip, Phys. Rev. B 58, 2539 (1998).
25. J. Tersoff, Phys. Rev. B 38, 9902 (1988).
26. F.H. Stillinger and T.A. Weber, Phys. Rev. B 31, 5262 (1985).
27. E. Bøgh, Can. J. Phys. 46, 653 (1968).
28. G. Bachelet, D. Hamann, and M. Schlüter, Phys. Rev. B 26, 4199 (1982).
29. These calculations were performed using the plane-wave self-consistent-field PWSCF code: http://www.pwscf.org
30. J.F. Ziegler, J.P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
31. G. Lulli, E. Albertazzi, M. Bianconi, R. Nipoti, M. Cervera, A. Carnèra, and C. Cellini, J. Appl. Phys. 82, 5958 (1997).
32. M. Bianconi, R. Nipoti, M. Cantiano, A. Gasparotto, and A. Sambo, Nucl. Instrum. Methods Phys. Res. B 84, 507 (1994).
33. J. Li, Modell. Simul. Mater. Sci. Eng. 11, 173 (2003).