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Volumn 13, Issue 1, 2001, Pages
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Identification of the tetra-interstitial in silicon
a
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Author keywords
[No Author keywords available]
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Indexed keywords
AGGLOMERATION;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
ELECTRON SPIN RESONANCE SPECTROSCOPY;
ELECTRONIC PROPERTIES;
ION IMPLANTATION;
MOLECULAR VIBRATIONS;
OPTICAL PROPERTIES;
POINT DEFECTS;
TETRA-INTERSTITIALS;
SEMICONDUCTING SILICON;
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EID: 0035127690
PISSN: 09538984
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-8984/13/1/101 Document Type: Article |
Times cited : (70)
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References (21)
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