Thermal decomposition reactions of acetaldehyde and acetone on Si(100)

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 1146-1154

  Armstrong, J L ^a   White, J M ^a   Langell, M ^b  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^b UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

[CARBONYL; BOND CLEAVAGES; BOND ORDERS; CARBONYL GROUPS; HIGH RESOLUTION ELECTRON ENERGY LOSS SPECTROSCOPY; SI(1 0 0); SI-DIMER; THERMAL DECOMPOSITION REACTION; THERMAL INTERACTION; TOTAL LOSS; XPS;

ACETONE; ALDEHYDES; CARBONYLATION; CHEMICAL BONDS; DIMERS; ENERGY DISSIPATION; FUNCTIONAL GROUPS; MONOLAYERS; OXYGEN; PYROLYSIS; REACTION KINETICS; SILICON; SILICON CARBIDE; SILICON OXIDES; TEMPERATURE PROGRAMMED DESORPTION; X RAY PHOTOELECTRON SPECTROSCOPY; CHEMISORPTION; DISSOCIATION; ELECTRON ENERGY LOSS SPECTROSCOPY; SPUTTERING;

ELECTRON ENERGY LOSS SPECTROSCOPY; SEMICONDUCTING SILICON;

ACETALDEHYDE; THERMAL INTERACTIONS;

EID: 0031139191     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580445     Document Type: Article

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