Adsorption and thermal chemistry of 1,1,1,5,5,5,-hexafluoro-2,4-pentanedione (hfacH) and (hexafluoroacetylacetonate)Cu(vinyltrimethylsilane) ((hfac)Cu(VTMS)) on TiCN-covered Si(1 0 0) surface

Surface Science

Volumn 601, Issue 1, 2007, Pages 155-164

  Pirolli, Laurent ^a   Teplyakov, Andrew V ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

Copper deposition; Density functional calculations; Infrared spectroscopy; Metal semiconductor interfaces; Precursor molecules

Indexed keywords

ADSORPTION; COPPER COMPOUNDS; DEPOSITION; HYDROGENATION; MOLECULAR STRUCTURE; THERMAL DIFFUSION;

COPPER DEPOSITION; DENSITY FUNCTIONAL CALCULATIONS; METAL SEMICONDUCTOR INTERFACES; PRECURSOR MOLECULES;

SURFACE STRUCTURE;

EID: 33845613198     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.09.018     Document Type: Article

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