Microscopic TV holography for MEMS deflection and 3-D surface profile characterization

Optics and Lasers in Engineering

Volumn 46, Issue 9, 2008, Pages 687-694

  Paul Kumar, U ^a   Bhaduri, Basanta ^a   Krishna Mohan, N ^a   Kothiyal, M P ^a   Asundi, A K ^b  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Fringe analysis; Interferometry; MEMS; Phase shifting; Speckle; TV holography

Indexed keywords

ASPHALT PAVEMENTS; COMPOSITE MICROMECHANICS; COMPUTER NETWORKS; CONFORMAL MAPPING; CURVE FITTING; DATA RECORDING; ELECTROCHEMICAL SENSORS; HOLOGRAPHIC INTERFEROMETRY; INDUSTRIAL MANAGEMENT; INTERFEROMETRY; LASER RECORDING; MAPS; MEASUREMENTS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICS; PHOTONICS; QUALITY ASSURANCE; REAL TIME SYSTEMS; RELIABILITY; SPECKLE; SPECTROSCOPIC ANALYSIS; SURFACE PROPERTIES; SURFACES; TRACE ELEMENTS;

DEFLECTION (OVALIZATION); ELSEVIER (CO); EXPERIMENTAL RESULTS; HOLOGRAPHIC SYSTEMS; INDUSTRIAL DEMANDS; MEMS INDUSTRY; MICRO ELECTRO MECHANICAL SYSTEMS (MEMS); MICROELEMENTS; NOISY PHASE MAPS; NON DESTRUCTIVE; OUT-OF-PLANE DEFLECTION; PHASE-SHIFTING ALGORITHMS; PRODUCT QUALITIES; QUANTITATIVE MEASUREMENTS; SMOOTH SURFACES; SPECKLE INTERFEROMETRY; SURFACE PROFILE ANALYSIS; SURFACE PROFILING; TV HOLOGRAPHY; WORKING DISTANCE (WD); WRAPPED PHASE MAP;

SURFACE ANALYSIS;

EID: 45649083855     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2008.04.011     Document Type: Article

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