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Volumn 16, Issue 3, 2005, Pages 653-658

Characterization of the mechanical properties of microscale elastomeric membranes

Author keywords

Bending to stretching transition; Linear elastic; Shaft load test; Silicon rubber membranes; Viscoelastic; Young's modulus

Indexed keywords

CURVE FITTING; ELASTIC MODULI; ELASTICITY; OPTICAL CORRELATION; OPTICAL MICROSCOPY; PRECISION BALANCES;

EID: 24144456189     PISSN: 09570233     EISSN: 09570233     Source Type: Journal    
DOI: 10.1088/0957-0233/16/3/005     Document Type: Article
Times cited : (14)

References (18)
  • 1
    • 0029350601 scopus 로고
    • Closed-form expressions for the relationships between stress, diaphragm deflection, and resistance change with pressure in silicon piezoresistive pressure sensors
    • Elgamel H E 1995 Closed-form expressions for the relationships between stress, diaphragm deflection, and resistance change with pressure in silicon piezoresistive pressure sensors Sensors Actuators A 50 17-22
    • (1995) Sensors Actuators A , vol.50 , pp. 17-22
    • Elgamel, H.E.1
  • 2
    • 3543126217 scopus 로고
    • Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials
    • Steinmann R, Friemann H, Prescher C and Schellin R 1995 Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials Sensors Actuators A 48 37-46
    • (1995) Sensors Actuators A , vol.48 , pp. 37-46
    • Steinmann, R.1    Friemann, H.2    Prescher, C.3    Schellin, R.4
  • 3
    • 0033333634 scopus 로고    scopus 로고
    • Design, fabrication and testing of micromachined silicone rubber membrane valves
    • Yang X, Grosjean C and Tai Y C 1999 Design, fabrication and testing of micromachined silicone rubber membrane valves J. Microelectromech. Syst. 8 393-402
    • (1999) J. Microelectromech. Syst. , vol.8 , pp. 393-402
    • Yang, X.1    Grosjean, C.2    Tai, Y.C.3
  • 6
    • 0031236953 scopus 로고    scopus 로고
    • A new technique for measuring the mechanical properties of thin films
    • Sharpe W N Jr, Yuan B and Edwards R L 1997 A new technique for measuring the mechanical properties of thin films J. Microelectromech. Syst. 6 193-9
    • (1997) J. Microelectromech. Syst. , vol.6 , pp. 193-199
    • Sharpe Jr., W.N.1    Yuan, B.2    Edwards, R.L.3
  • 7
  • 8
    • 0036504397 scopus 로고    scopus 로고
    • A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy
    • Chasiotis I and Knauss W G 2002 A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy Exp. Mech. 42 51-7
    • (2002) Exp. Mech. , vol.42 , pp. 51-57
    • Chasiotis, I.1    Knauss, W.G.2
  • 9
    • 0036887933 scopus 로고    scopus 로고
    • Mechanical behavior of 30-50 nm thick aluminum films under uniaxial tension
    • Haque M A and Saif M T A 2002 Mechanical behavior of 30-50 nm thick aluminum films under uniaxial tension Scr. Mater. 47 863-7
    • (2002) Scr. Mater. , vol.47 , pp. 863-867
    • Haque, M.A.1    Saif, M.T.A.2
  • 11
    • 0040055606 scopus 로고
    • Measuring the strength and stiffness of thin film materials by mechanically deflecting cantilever beams
    • Weihs T P, Hong S, Bravman J C and Nix W D 1989 Measuring the strength and stiffness of thin film materials by mechanically deflecting cantilever beams Mater. Res. Soc. Symp. Proc. 130 87-92
    • (1989) Mater. Res. Soc. Symp. Proc. , vol.130 , pp. 87-92
    • Weihs, T.P.1    Hong, S.2    Bravman, J.C.3    Nix, W.D.4
  • 12
    • 34249757815 scopus 로고
    • Fracture mechanics of a shaft-loaded blister of thin flexible membrane on rigid substrate
    • Wan K T and Mai Y W 1990 Fracture mechanics of a shaft-loaded blister of thin flexible membrane on rigid substrate Int. J. Fract. 74 181-97
    • (1990) Int. J. Fract. , vol.74 , pp. 181-197
    • Wan, K.T.1    Mai, Y.W.2
  • 13
    • 0024771422 scopus 로고
    • Mechanical property measurements of thin films using load-deflection of composite rectangular membranes
    • Tabata O, Kawahata K, Sugiyama S and Igarashi I 1989 Mechanical property measurements of thin films using load-deflection of composite rectangular membranes Sensors Actuators 20 135-41
    • (1989) Sensors Actuators , vol.20 , pp. 135-141
    • Tabata, O.1    Kawahata, K.2    Sugiyama, S.3    Igarashi, I.4
  • 14
    • 0001859754 scopus 로고
    • The application of the blister test to an elastomeric adhesive
    • Briscoe B J and Panesar S S 1991 The application of the blister test to an elastomeric adhesive Proc. K. Soc. A 443 23-43
    • (1991) Proc. K. Soc. A , vol.443 , pp. 23-43
    • Briscoe, B.J.1    Panesar, S.S.2
  • 15
    • 0344558738 scopus 로고
    • Fracture mechanics of a new blister test with stable crack growth
    • Wan K T and Mai Y W 1995 Fracture mechanics of a new blister test with stable crack growth Acta Metall. Mater. 43 4109-15
    • (1995) Acta Metall. Mater. , vol.43 , pp. 4109-4115
    • Wan, K.T.1    Mai, Y.W.2
  • 16
    • 0035822569 scopus 로고    scopus 로고
    • A novel technique for mechanical characterization of thin elastomeric membrane
    • Liu K K and Ju B F 2001 A novel technique for mechanical characterization of thin elastomeric membrane. J. Phys. D: Appl. Phys. 34 L91-4
    • (2001) J. Phys. D: Appl. Phys. , vol.34
    • Liu, K.K.1    Ju, B.F.2
  • 17
    • 0000202562 scopus 로고    scopus 로고
    • Fracture mechanics of a shaft-loaded blister test - Transition from a bending plate to a stretching membrane
    • Wan K T 1999 Fracture mechanics of a shaft-loaded blister test - transition from a bending plate to a stretching membrane J. Adhes. 70 209-19
    • (1999) J. Adhes. , vol.70 , pp. 209-219
    • Wan, K.T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.