Hybrid analysis of micromachined silicon thin film based on digital microscopic holography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5458, Issue , 2004, Pages 236-243

  Xu, Lei ^a   Peng, Xiaoyuan ^a   Miao, Jianmin ^a   Asundi, Anand K ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Digital microscopic holography; Finite element method; Hybrid approach; Micro metrology; Thin film analysis

Indexed keywords

DIGITAL MICROSCOPIC HOLOGRAPHY; HYBRID APPROACH; MICRO METROLOGY; THIN FILM ANALYSIS;

FINITE ELEMENT METHOD; HOLOGRAPHY; MATHEMATICAL MODELS; MEASUREMENTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SENSITIVITY ANALYSIS; THIN FILMS;

SILICON;

EID: 10044257617     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.546600     Document Type: Conference Paper

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