Surface topography of microstructures in lithium niobate by digital holographic microscopy

Measurement Science and Technology

Volumn 15, Issue 5, 2004, Pages 961-968

  De Nicola, S ^a   Ferraro, P ^b   Finizio, A ^a   Grilli, S ^b   Coppola, G ^a   Iodice, M ^a   De Natale, P ^b   Chiarini, M ^a  

^a CNR   (Italy)

^b ISTITUTO NAZIONALE DI OTTICA   (Italy)

Author keywords

Digital holography; Lithium niobate; Microscopy; Microstructures

Indexed keywords

CANTILEVER BEAMS; CRYSTALS; ETCHING; FERROELECTRIC MATERIALS; HOLOGRAPHY; IMAGE PROCESSING; LITHIUM COMPOUNDS; MICROSTRUCTURE; WAVEGUIDES;

IMAGE ACQUISITION; OBJECT MORPHOLOGY; PRECISE CONTROL; SURFACE QUALITY;

MEASUREMENT THEORY;

MEASUREMENT METHOD; MICROSTRUCTURE; TOPOGRAPHY;

EID: 2542417986     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/15/5/026     Document Type: Article

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