Digital laser microinterferometer and its applications

Optical Engineering

Volumn 42, Issue 5, 2003, Pages 1417-1426

  Yang, Lianxiang ^a   Colbourne, Paul ^b  

^a Oakland University   (United States)

^b JDS UNIPHASE   (United States)

Author keywords

Displacement; Laser interferometry; MEMS; Microelements; Shape; Speckle interferometry

Indexed keywords

INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; SPECKLE; STRAIN; STRESS ANALYSIS;

LASER MICROINTERFEROMETER;

LASERS;

EID: 0037704611     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1564103     Document Type: Article

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