Analysis of static and dynamic operational behaviour of active micromembranes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5458, Issue , 2004, Pages 25-33

  Aswendt, Petra ^a   Dean, Thierry ^b  

^a FRAUNHOFER INSTITUTE FOR MACHINE TOOLS AND FORMING TECHNOLOGY IWU   (Germany)

^b THALES RESEARCH AND TECHNOLOGY   (France)

Author keywords

Deep ultraviolet light; MEMS; Micromembranes; Speckle interferometry

Indexed keywords

ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; INTERFEROMETRY; MICROMETERS; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SILICON;

DEEP ULTRAVIOLET LIGHT; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROMEMBRANES; SPECKLE INTERFEROMETRY;

MICROELECTROMECHANICAL DEVICES;

EID: 10044257629     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.547720     Document Type: Conference Paper

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