Coatings and microstructures of monolithic TiB2 films and double layer and composite TiCN/TiB2 films from alkoxide solutions by thermal plasma CVD

Thin Solid Films

Volumn 516, Issue 19, 2008, Pages 6616-6621

  Shimada, S ^a   Takahashi, M ^a   Kiyono, H ^a   Tsujino, J ^b  

^a HOKKAIDO UNIVERSITY   (Japan)

^b Hokkaido Electric Power Co Inc   (Japan)

Author keywords

Coating; Composite layer; Double layer; PECVD; TiB2; TiCN

Indexed keywords

LITHOGRAPHY;

THIN FILMS;

EID: 45549087723     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.11.093     Document Type: Article

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