Synthesis of anticorrosion SiC and SiNx films from alkoxide solution using liquid injection PECVD

Surface and Coatings Technology

Volumn 201, Issue 3-4, 2006, Pages 1160-1165

  Li, Y S ^a   Shimada, S ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Alkoxide solution; Corrosion resistance; Plasma CVD; Protective coating; SiC; SiNx

Indexed keywords

CORROSION RESISTANCE; CRYSTALLINE MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICONE COATINGS; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ALKOXIDE SOLUTION; CORROSIVE EXPOSURE;

PROTECTIVE COATINGS;

CORROSION RESISTANCE; CRYSTALLINE MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY; SILICONE COATINGS; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33748429145     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.01.038     Document Type: Article

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