Microstructure evolution and grain growth of nanocomposite TiN-TiB2 films: experiment and simulation

Surface and Coatings Technology

Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6474-6478

  Shen, Y G ^a   Lu, Y H ^a   Liu, Z J ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Microstructure; Monte Carlo simulation; Reactive unbalanced magnetron sputtering; TiN TiB2 nanocomposite films

Indexed keywords

BORON; COMPUTER SIMULATION; GRAIN BOUNDARIES; GRAIN GROWTH; HIGH RESOLUTION ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; MICROSTRUCTURE; MONTE CARLO METHODS; NANOSTRUCTURED MATERIALS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS MATRICES; MICROSTRUCTURE EVOLUTION; NANOCOMPOSITE FILMS; REACTIVE UNBALANCED MAGNETRON SPUTTERING;

TITANIUM COMPOUNDS;

BORON; COMPUTER SIMULATION; GRAIN BOUNDARIES; GRAIN GROWTH; HIGH RESOLUTION ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; MICROSTRUCTURE; MONTE CARLO METHODS; NANOSTRUCTURED MATERIALS; TITANIUM COMPOUNDS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33646128012     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.065     Document Type: Article

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