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Volumn 177-178, Issue , 2004, Pages 591-596

Hardness, internal stress and thermal stability of TiB2/TiC multilayer coatings synthesized by magnetron sputtering with and without substrate rotation

(4) Lee, Kitty W a Chen, Yu Hsia a Chung, Yip Wah a Keer, Leon M b

a NORTHWESTERN UNIVERSITY (United States)

b Northwestern University (United States)

Author keywords

Hardness; Internal stress; Sputtering; Substrate rotation; Thermal stability

Indexed keywords

COMPRESSIVE STRESS; HARDNESS; MAGNETRON SPUTTERING; MULTILAYERS; RESIDUAL STRESSES; THERMODYNAMIC STABILITY; TITANIUM COMPOUNDS;

ROTATING SUBSTRATES; SURFACE DIFFUSION;

PROTECTIVE COATINGS;

COATING;

EID: 1342268778 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00931-9 Document Type: Article

Times cited : (71)

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