SCOPUS 정보 검색 플랫폼

Volumn 174-175, Issue , 2003, Pages 720-724

Mechanical properties of TiN/TiB2 multilayers deposited by plasma enhanced chemical vapor deposition

Author keywords

Mechanical properties; Plasma enhanced chemical vapor deposition PECVD; TiN TiB2

Indexed keywords

CRACK PROPAGATION; HARDNESS; MONOLAYERS; MULTILAYERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STEEL ANALYSIS; TITANIUM NITRIDE; WEAR RESISTANCE;

GAS MIXTURES;

TITANIUM PLATING;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 18144443621 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00574-7 Document Type: Article

Times cited : (36)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.