Actuation by electrostatic repulsion by nonvolatile charge injection

Sensors and Actuators, A: Physical

Volumn 119, Issue 1, 2005, Pages 236-244

  Liu, Zengtao ^a,b   Kim, Myongseob ^a   Shen, Nick Yu Min ^a   Kan, Edwin C ^a  

^a School of Chemical and Molecular Engineering   (United States)

^b FASL LLC   (United States)

Author keywords

Actuation; EEPROM; Nonvolatile charges; Repulsion

Indexed keywords

CAPACITORS; ELECTRIC CHARGE; ELECTROSTATICS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; RESONATORS; ROM; TUNING; VARACTORS;

ACTUATION; ELECTRICALLY ERASABLE PROGRAMMABLE READ ONLY MEMORY (EEPROM); ELECTROSTATIC REPULSION; NONVOLATILE CHARGES;

ACTUATORS;

EID: 17144424997     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(04)00192-X     Document Type: Article

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