Laterally driven electrostatic repulsive-force microactuators using asymmetric field distribution

Journal of Microelectromechanical Systems

Volumn 10, Issue 1, 2001, Pages 128-136

  Lee, Ki Bang ^b   Cho, Young Ho ^a,b  

^a Korea Advanced Institute of Science and Technology ^*

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Creeping flow; Electrostatic force; Frequency tuning; Microresonator; Quality factor; Repulsive force.

Indexed keywords

COMPUTER SIMULATION; CREEP; DYNAMIC RESPONSE; FINITE ELEMENT METHOD; MASKS; MATHEMATICAL MODELS; MICROMACHINING; NATURAL FREQUENCIES; POLYCRYSTALLINE MATERIALS; POLYSILICON; Q FACTOR MEASUREMENT;

ELECTROSTATIC REPULSIVE-FORCE MICROACTUATORS;

ELECTROSTATIC ACTUATORS;

EID: 0035276044     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.911101     Document Type: Article

References (11)

1. IC-Processed Electrostatic micromotors
2. A study of three microfabricated variable-capacitance motors
3. Laterally driven polysilicon resonant microstructures
4. A triangular electrostatic comb array for micromechanical resonant frequency tuning
5. A surface-micromachined tunable microgyroscope
6. Viscous damping model for laterally oscillating microstructures
7. Electrostatic control of mechanical quality factors for surface micromachined lateral resonators
8. Modeling of the mechanical behavior of a differential capacitor acceleration sensor