An electric induction micromotor

Journal of Microelectromechanical Systems

Volumn 14, Issue 5, 2005, Pages 1127-1143

  Nagle, Steven F ^a   Livermore, Carol ^b   Frechette, Luc G ^c   Ghodssi, Reza ^d   Lang, Jeffrey H ^a  

^a USA   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

^c University of Maryland ^*  (United States)

^d UNIVERSITY OF MARYLAND   (United States)

Author keywords

Deep reactive ion etching (DRIE); Duffing oscillator; Electrostatic actuator modeling design analysis; Micromotor; Power microelectromechanical systems (Power MEMS) fabrication; Quasi static electric induction machine motor generator; Torque measurement

Indexed keywords

ELECTRIC MACHINERY TESTING; ELECTRIC MOTORS; ELECTRODYNAMICS; ELECTROSTATIC ACTUATORS; INDUCTION MOTORS; MATHEMATICAL MODELS; OSCILLATORS (ELECTRONIC); REACTIVE ION ETCHING; STATORS; TORQUE MEASUREMENT;

DEEP REACTIVE ION ETCHING (DRIE); DUFFING OSCILLATOR; ELECTRIC INDUCTION MICROMOTOR; ELECTROSTATIC ACTUATOR MODELING DESIGN ANALYSIS; PHASE MOTOR; POWER MICROELECTROMECHANICAL SYSTEMS; QUASI-STATIC ELECTRIC INDUCTION MACHINE MOTOR GENERATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 27644527326     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.851816     Document Type: Article

References (27)

1. A. H. Epstein and S. D. Senturia, "Macro power from micro machinery," Science, vol. 276, p. 1211, May 1997.
2. A. Epstein et al., "Power MEMS and microengines," in Transducers 97; 1997 Int. Conf. Solid-State Sens. Actuators, Dig. Tech. Papers, vol. 2, 1997, pp. 753-756.
3. E. J. Garcia and J. J. Sniegowski, "Surface micromachined microengine," Sens. Actuators A, vol. A48, no. 3, pp. 203-214, May 1995.
4. B. Makin and B. J. Coles, "Novel electrostatic micromotors," in Proc. Sixth Int. Conf. Elect. Machines and Drives, 1993, Conf. Publ. 376, pp. 1-3.
5. J. Melcher, Continuum Electromechanics. Cambridge: MIT Press, 1981, pp. 5-45.
6. B. Bollée, "Electrostatic motors," Philips Tech. Rev., vol. 30, no. 6/7, pp. 178-194, 1969.
7. S. D. Choi and D. A. Dunn, "A surface-charge induction motor," Proc. IEEE, vol. 59, no. 5, pp. 737-748, May 1971.
8. P. T. Krein and J. M. Crowley, "Harmonic effects in electrostatic induction motors," Elect. Mach. Power Syst., vol. 10, no. 5-6, pp. 479-497, 1985.
9. E. R. Mognaschi and J. H. Calderwood, "Asynchronous dielectric induction motor," IEE Proc. -A-Science Measure. Technol., vol. 137, no. 6, pp. 331-338, Nov. 1990.
10. C. Kooy, "Torque on a resistive rotor in a quasi electrostatic rotating field," Appl. Scientif. Res., vol. 20, no. 2-3, pp. 161-172, Feb. 1969.
11. J. Ubbink, "Optimization of the rotor surface resistance of the asynchronous electrostatic motor," Appl. Scientif. Res., vol. 22, no. 6, pp. 442-448, Oct. 1970.
12. S. F. Bart and J. H. Lang, "An analysis of electroquasistatic induction micromotors," Sens. Actuators, vol. 20, pp. 97-106, Nov. 1989.
13. J. F. Charpentier, Y. Lefevre, E. Sarraute, and B. Trannoy, "Synthesis and modeling of an electrostatic induction motor," IEEE Trans. Magn., vol. 31, no. 3, pp. 1404-1407, May 1995.
14. D. M. Freeman, A. J. Aranyosi, M. J. Gordon, and S. S. Hong, "Multidimensional motion analysis of MEMS using computer microvision," in Solid-State Sensor and Actuator Workshop, Cleveland, OH, 1998, pp. 150-155.
15. N. W. McLachlan, Ordinary Non-Linear Differential Equations in Engineering and Physical Sciences, 2nd ed. London, U.K.: Oxford University Press, 1956.
16. R. A. Pease, Troubleshooting Analog Circuits. Newton, MA: Butterworth-Heineman, 1993, p. 83.
17. T. Kamins, Polycrystalline Silicon for Integrated Circuits and Displays, 2nd ed. Boston, MA: Kluwer Academic, 1998.
18. L. G. Frechette, "Development of a microfabricated silicon motor-driven compression system," Ph.D. dissertation, MIT Dep. Aeronaut. Astronaut., 2000.
19. S. F. Nagle, "Analysis, design, and fabrication of an electric induction micromotor for a gas-turbine generator," Ph.D. dissertation, MIT Dep. Electrical Engineering and Computer Sci., 2000.
20. H. Woodson and J. Melcher, Electromechanical Dynamics, Parts I and II Malabar, FL, 1968.
21. W. Weaver Jr, S. P. Timoshenko, and D. H. Young, Vibration Problems in Engineering, 5th ed. New York: Wiley, 1990.
22. R. Arno, "Über ein Rotirendes Elektrisches Feld und Dursh Elektrostatische Hysteresis Bewirkte Rotationen," Electrotechn Z, vol. 14, pp. 17-18, 1863.
23. J. H. Calderwood and R. Mognaschi, "The spatial harmonic content of the field of an electrostatic induction motor," Int. J. Appl. Electromagn. Mater., vol. 6, no. 3, pp. 197-205, Nov. 1995.
24. R. Ghodssi, L. G. Frechette, S. F. Nagle, X. Zhang, A. A. Ayon, S. D. Senturia, and M. A. Schmidt, "Thick Buried Oxide in Silicon (TBOS): an integrated fabrication technology for multi-stack wafer-bonded MEMS processes," in Proc. 10th Int. Conf. Solid-State Sens. Actuators (Transducers 99), Sendai, Japan, Jun. 7-10, 1999.
25. H. Koser, "Development of Magnetic Induction Machines for Micro Turbo Machinery," Ph.D. Thesis, MIT Dep. Elect. Eng. Comput. Sci., 2002.
26. H. Koser, F. Cros, M. G. Allen, and J. H. Lang, "A high torque density MEMS magnetic induction machine," in Proc.: 11th Int. Conf. Solid-State Sens. Actuators, Munich, Germany, Jun. 10-14, 2001, pp. 284-287.
27. T. J. E. Miller, Switched-Reluctance Motors and Their Control. Oxford, U.K.: Oxford University Press, 1993.