Development and fabrication of a rotary micropump and its industrial and medical applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2882, Issue , 1996, Pages 218-225

  Weisener, Thomas ^a   Voegele, Gerald ^a   Widmann, Mark ^a   Bark, Carlo ^a   Schraft, Rolf D ^a   Bertholds, Axel ^a   Braunschweiler, Andreas ^a  

^a Fraunhofer Inst A   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROHYDRAULIC SYSTEMS; MICROPUMPS; MICROSYSTEMS;

DESIGN; FABRICATION; HYDRAULICS; INDUSTRIAL APPLICATIONS; MEDICAL APPLICATIONS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROMETERS; TECHNOLOGY;

ROTARY PUMPS;

EID: 0030393034     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)