Probe current, probe size, and the practical brightness for probe forming systems

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 3, 2008, Pages 949-955

  Bronsgeest, M S ^a   Barth, J E ^a   Swanson, L W ^b   Kruit, P ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COLD FIELD EMITTERS; GAUSSIAN ELECTRON BEAMS; ION BEAM MICROSCOPES; LITHOGRAPHY SYSTEMS;

ELECTRON BEAM LITHOGRAPHY; FIELD EMISSION; GAUSSIAN BEAMS; ION BEAMS; PARTICLE SIZE; SCHOTTKY BARRIER DIODES;

ELECTRON PROBE MICROANALYSIS;

EID: 44649142478     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2907780     Document Type: Article

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