A new evaluation method of electron optical performance of high beam current probe forming systems

Journal of Electron Microscopy

Volumn 54, Issue 5, 2005, Pages 413-427

  Fujita, Shin ^a,b   Shimoyama, Hiroshi ^b  

^a SHIMADZU CORPORATION   (Japan)

^b MEIJO UNIVERSITY   (Japan)

Author keywords

Aberration; Beam current; Brightness; Crossover; Electron gun; Probe size

Indexed keywords

ELECTRON GUNS; ELECTRONS; FIELD EMISSION CATHODES; FIELD EMISSION DISPLAYS; LUMINANCE; NUMERICAL METHODS; PROBES;

% REDUCTIONS; BEAM CURRENTS; CROSSOVER; FORMING SYSTEMS; NEW EVALUATION METHODS; OPTICAL PERFORMANCE; POINT CATHODES; PROBE SIZE; PROPERTY; SPHERICAL ABERRATIONS;

ABERRATIONS;

EID: 29444434176     PISSN: 00220744     EISSN: 14779986     Source Type: Journal    
DOI: 10.1093/jmicro/dfi063     Document Type: Article

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