Nanotip electron gun for the scanning electron microscope

Scanning

Volumn 28, Issue 3, 2006, Pages 133-141

  Vladár, András E ^a   Radi, Zsolt ^a   Postek, Michael T ^a   Joy, David C ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

Author keywords

Electron gun; Metrology; Nanotip; Resolution; Scanning electron microscope; Scanning electron microscopy

Indexed keywords

ELECTRON MICROSCOPES; FIELD EMISSION CATHODES; MEASUREMENTS; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; SIGNAL TO NOISE RATIO;

HIGH-RESOLUTION IMAGING; NANOTIP; REGULAR EMITTER; SHARP EMITTER;

ELECTRON GUNS;

COPPER; GOLD; TUNGSTEN;

ARTICLE; ELECTRON; ELECTRON MICROSCOPE; IMAGE ANALYSIS; NANOTECHNOLOGY; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SIGNAL NOISE RATIO;

MEASUREMENT; MICROSCOPES; SCANNING ELECTRON MICROSCOPY;

EID: 33746265866     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950280301     Document Type: Article

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