Gun lens theory for nonparaxial trajectories by canonical mapping transformation: Characterization of general skewed rays inside electron guns by electron gun focal length

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 4, 2006, Pages 1891-1901

  Fujita, Shin ^a   Shimoyama, Hiroshi ^b  

^a SHIMADZU CORPORATION   (Japan)

^b MEIJO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; CURRENT DENSITY; ELECTRON LENSES; LIGHT TRANSMISSION; MAPPING; MATHEMATICAL TRANSFORMATIONS; OPTICAL PROPERTIES; VECTORS;

CANONICAL MAPPING TRANSFORMATION (CMT); GUN LENS THEORY; OPTICAL PARAMETERS; SKEWED RAYS;

ELECTRON GUNS;

EID: 33746557518     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2218872     Document Type: Article

References (11)

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