Thickness dependence of the nanoscale piezoelectric properties measured by piezoresponse force microscopy on (1 1 1)-oriented PLZT 10/40/60 thin films

Surface Science

Volumn 602, Issue 11, 2008, Pages 1987-1992

  Ferri, A ^a   Saitzek, S ^a   Da Costa, A ^a   Desfeux, R ^a   Leclerc, G ^b   Bouregba, R ^b   Poullain, G ^b  

^a UNIVERSITÉ D'ARTOIS   (France)

^b LABORATOIRE CRISMAT   (France)

Author keywords

(Pb, La)(Zr, Ti)O3 ferroelectric thin films; Atomic force microscopy; Coercive voltage; Imprint; Local piezoelectric hysteresis loops; Nanoscale investigations; Piezoresponse force microscopy; Surface morphology

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC SPACE CHARGE; EPITAXIAL GROWTH; FERROELECTRIC MATERIALS; PIEZOELECTRIC MATERIALS; SURFACE MORPHOLOGY; THICKNESS MEASUREMENT;

COERCIVE VOLTAGE; LOCAL PIEZOELECTRIC HYSTERESIS LOOPS; NANOSCALE INVESTIGATIONS; PIEZORESPONSE FORCE MICROSCOPY;

THIN FILMS;

EID: 44649127241     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2008.04.001     Document Type: Article

References (22)

1. Park H.-H., Kim W.S., Yang J.-K., Park H.-H., and Hill R.H. Microelec. Eng. 71 (2004) 215
2. Shvartsman V.V., Kholkin A.L., Orlova A., Kiselev D., Bogomolov A.A., and Sternberg A. Appl. Phys. Lett. 86 (2005) 202907
3. Craciun F., Dinescu M., Verardi P., Scarisoreanu N., Moldovan A., Purice A., and Galassi C. Appl. Surf. Sci. 248 (2005) 329
4. Leclerc G., Domengès B., Poullain G., and Bouregba R. Appl. Surf. Sci. 253 (2006) 1143
5. Tang X.G., Ding A.L., Ye Y., and Chen W.X. Thin Solid Films 423 (2003) 13
6. Poyato P., Calzada M.L., Shvarstman V.V., Kholkin A., Vilarinho P., and Pardo L. Appl. Phys. A 81 (2005) 1207
7. Honda Y., Yokoyama S., Funakubo H., and Saito K. Mater. Sci. Eng. 120 (2005) 161
8. Tyunina M., Levoska J., Sternberg A., and Leppävuori S. J. Appl. Phys. 84 (1998) 6800
9. Tokuda T., Nakano T., Fujiu D., Ohta J., and Nunoshita M. Mater. Lett. 59 (2005) 1234
10. Kholkin A.L., Shvarstman V.V., Emelyanov A.Y., Poyato R., Calzada M.L., and Pardo L. Appl. Phys. Lett. 82 (2003) 2127
11. Desfeux R., Da Costa A., and Prellier W. Surf. Sci. 497 (2002) 81
12. Desfeux R., Legrand C., Da Costa A., Chateigner D., Bouregba R., and Poullain G. Surf. Sci. 600 (2006) 219
13. Kalinin S.V., and Bonnell D.A. Phys. Rev. B 65 (2002) 125408
14. Alexe M., and Gruverman A. Nanoscale Characterization of Ferroelectric Materials-Scanning Probe Microscopy Approach (2004), Springer Verlag, Berlin
15. Legrand C., Da Costa A., Desfeux R., Soyer C., and Rémiens D. Appl. Surf. Sci. 253 (2007) 4942
16. Ferri A., Da Costa A., Desfeux R., Detalle M., Wang G.S., and Rémiens D. Integr. Ferroelectr. 91 (2007) 80
17. Berndt L.M., Baldarin V., and Suzuki Y. Appl. Phys. Lett. 77 (2000) 2903
18. Gruverman A., Auciello O., and Tokumoto H. Annu. Rev. Mater. Sci. 28 (1998) 101
19. Gruverman A., Rodriguez B.J., Nemanich R.J., and Kingon A.I. J. Appl. Phys. 92 (2002) 2734
20. A. Ferri, A. Da Costa, S. Saitzek, R. Desfeux, M. Detalle, G.S. Wang, D. Rémiens, Ferroelectrics, in press.
21. Jesse S., Baddorf A.P., and Kalinin S.V. Appl. Phys. Lett. 88 (2006) 062908
22. Hong J., Song H.W., Hong S., Shin H., and No K. J. Appl. Phys. 92 (2002) 7434