Elaboration of (1 1 1)-oriented La-doped PZT thin films on platinized silicon substrates

Applied Surface Science

Volumn 253, Issue 3, 2006, Pages 1143-1149

  Leclerc, G ^a   Domenges B ^b   Poullain, G ^a   Bouregba, R ^a  

^a LABORATOIRE CRISMAT   (France)

^b UNIVERSITÉ DE CAEN   (France)

Author keywords

Electron microscopy; Ferroelectric; Interfaces; Multi target sputtering; PLZT films

Indexed keywords

DEPOSITION; DOPING (ADDITIVES); ELECTRON MICROSCOPY; FERROELECTRIC MATERIALS; INTERFACES (MATERIALS); LANTHANUM; PLATINUM; SILICON; SPUTTERING; SUBSTRATES;

MULTI TARGET SPUTTERING; PLZT FILMS; SILICON SUBSTRATES;

THIN FILMS;

EID: 33750739746     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.01.048     Document Type: Article

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