Deposition and characterization of TiAlN/TiAlON/Si3N4 tandem absorbers prepared using reactive direct current magnetron sputtering

Thin Solid Films

Volumn 516, Issue 18, 2008, Pages 6071-6078

  Barshilia, Harish C ^a   Selvakumar, N ^a   Rajam, K S ^a   Sridhara Rao, D V ^b   Muraleedharan, K ^b  

^a SURFACE ENGINEERING DIVISION   (India)

^b DEFENCE METALLURGICAL RESEARCH LABORATORY   (India)

Author keywords

Optical properties; Silicon nitride; Sputtering; Tandem absorber; Titanium aluminium oxinitride; Titanium aluminum nitride; Transmission electron microscopy; X ray photoelectron spectroscopy

Indexed keywords

DC MACHINERY; ELLIPSOMETRY; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SILICON NITRIDE; STAINLESS STEEL; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

NIMONIC SUBSTRATES; PHASE MODULATED ELLIPSOMETRY; REACTIVE DIRECT CURRENT MAGNETRON SPUTTERING; TANDEM ABSORBERS; TITANIUM ALUMINIUM OXINITRIDE; TITANIUM ALUMINUM NITRIDE;

TITANIUM COMPOUNDS;

EID: 44449153669     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.10.113     Document Type: Article

References (37)

1. Seraphin B.O. Solar Energy Conversion: Solid State Physics Aspects. Topics in Applied Physics vol. 31 (1979), Springer, Berlin 24
2. Vien T.K., Sella C., Lafait J., and Berthier S. Thin Solid Films 126 (1985) 17
3. Zhao S., and Wackelgard E. Sol. Energy Mater. Sol. Cells 90 (2006) 243
4. Adsten M., Joerger R., Jarrendahl K., and Wackelgard E. Sol. Energy 68 (2000) 325
5. Craighead H.G., Howard R.E., Sweeney J.E., and Buhrman R.A. Appl. Phys. Lett. 39 (1981) 29
6. Peterson R.E., and Ramsey J.W. J. Vac. Sci. Technol. 12 (1975) 174
7. Berghaus A., Djahanbaksh A., and Thomas L.K. Sol. Energy Mater. Sol. Cells 54 (1998) 19
8. Randich E., and Pettit R.B. Sol. Energy Mater. 5 (1981) 425
9. Richharia P., and Chopra K.L. Sol. Energy Mater. 19 (1989) 365
10. McDonald G.E. Sol. Energy 17 (1975) 119
11. K. Gelin, Ph. D. Thesis, Uppsala University, Sweden, 2004.
12. Lee Y.K., Latt K.M., Osipowicz T., and Yi C.S. Mater. Sci. Semicond. Process. 3 (2000) 191
13. Kwak M.Y., Shin D.H., Kang T.W., and Kim K.N. Thin Solid Films 339 (1999) 290
14. Munz W.D. J. Vac. Sci. Technol., A, Vac. Surf. Films 4 (1986) 2717
15. Park D.G., Cha T.H., Lee S.H., Yeo I.S., Park J.W., and Kim S.D. J. Vac. Sci. Technol. B 19 (2001) 2289
16. Luthier R., and Levy F. J. Vac. Sci. Technol., A, Vac. Surf. Films 9 (1991) 110
17. Kim H.C., and Alford T.L. Thin Solid Films 449 (2004) 6
18. Schuler A., Thommen V., Reimann P., Oelhafen P., Francz G., Zehnder T., Duggelin M., Mathys D., and Guggenheim R. J. Vac. Sci. Technol., A, Vac. Surf. Films 19 (2001) 922
19. Smith G.B., Swift P.D., and Bendavid A. Appl. Phys. Lett. 75 (1999) 630
20. Barshilia H.C., Selvakumar N., Rajam K.S., Rao D.V.S., Muraleedharan K., and Biswas A. Appl. Phys. Lett. 89 (2006) 191909
21. Barshilia H.C., Jain A., and Rajam K.S. Vacuum 72 (2004) 241
22. Barshilia H.C., Rajam K.S., and Rao D.V.S. Surf. Coat. Technol. 200 (2006) 4586
23. Grips V.K.W., Selvi V.E., Barshilia H.C., and Rajam K.S. Electrochim. Acta 51 (2006) 3461
24. Zhang Q.C., and Mills D.R. J. Appl. Phys. 72 (1992) 3013
25. Abeles F. Optical Properties of Solids (1972), North-Holland Publishing Company, Amsterdam 136
26. Bertoti I., Mohai M., Sullivan J.L., and Saied S.O. Appl. Surf. Sci. 84 (1995) 357
27. Bertoti I. Surf. Coat. Technol. 151-152 (2002) 194
28. Hellgren N., Johansson M.P., Broitman E., Hultman L., and Sundgren J.E. Phys. Rev., B 59 (1999) 5162
29. Pratap R., and Beshai M.H.N. J. Mater. Sci. Lett. 6 (1987) 71
30. Shum P.W., Zhou Z.F., Li K.Y., and Shen Y.G. Mater. Sci. Eng., B, Solid-state Mater. Adv. Technol. 100 (2003) 204
31. Vennemann A., Stock H.R., Kohlscheen J., Rambadt S., and Erkens G. Surf. Coat. Technol. 174-175 (2003) 408
32. Powder Diffraction File, Joint Committee on Powder Diffraction Standards (1967), ASTM, Philadelphia, PA (Card No. 6-0642)
33. Powder Diffraction File, Joint Committee on Powder Diffraction Standards (1967), ASTM, Philadelphia, PA (Card Nos. 4-0477 and 4-0551)
34. Luthier R., and Levy F. J. Vac. Sci. Technol., A, Vac. Surf. Films 9 (1991) 102
35. Jehn H.A. Surf. Coat. Technol. 125 (2000) 212
36. Gelin K., Bostrom T., and Wackelgard E. Thin Solid Films 437 (2003) 25
37. Barshilia H.C., Selvakumar N., and Rajam K.S. J. Vac. Sci. Technol., A, Vac. Surf. Films 25 (2007) 383