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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 3, 2001, Pages 922-929

Structural and optical properties of titanium aluminum nitride films (Ti1-xAlxN)

(9) Schüler, Andreas a Thommen, Verena a Reimann, Peter a Oelhafen, Peter a Francz, Gilbert b Zehnder, Thomas b Düggelin, Marcel a Mathys, Daniel a Guggenheim, Richard a

a UNIVERSITY OF BASEL (Switzerland)

b SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; FILM GROWTH; GRAIN BOUNDARIES; LIGHT ABSORPTION; MAGNETRON SPUTTERING; PHOTOELECTRON SPECTROSCOPY; SOLID SOLUTIONS; SPECTROPHOTOMETRY; SURFACE ROUGHNESS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

INFRARED ABSORPTION; TITANIUM ALUMINUM NITRIDE FILMS;

TITANIUM COMPOUNDS;

EID: 0035334043 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1359532 Document Type: Article

Times cited : (66)

References (33)

1
- 25544459890
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2717
- Münz, W.-D.¹

2
- 0023136972
- (1987) J. Vac. Sci. Technol. A , vol.5 , pp. 2173
- Knotek, O.¹ Münz, W.-D.² Leyendecker, T.³

3
- 0023438628
- (1987) Thin Solid Films , vol.153 , pp. 55
- Håkansson, G.¹ Sundgren, J.E.² McIntire, D.³ Green, J.E.⁴ Münz, W.-D.⁵

4
- 4244216035
- Linz, unpublished
- (1985) Proceedings of the International Conference Vacuum Metallurgy
- Knotek, O.¹ Bosch, W.² Leyendecker, T.³

5
- 0023453185
- (1983) Surf. Coat. Technol. , vol.33 , pp. 117
- Molarius, J.M.¹ Korhonen, A.S.² Harju, E.³ Lappalainen, R.⁴

6
- 13944274472
- (1990) J. Appl. Phys. , vol.67 , pp. 1542
- McIntire, D.¹ Green, J.E.² Håkansson, G.³ Sundgren, J.E.⁴ Münz, W.-D.⁵

7
- 0022025890
- (1985) J. Mater. Sci. Lett. , vol.4 , pp. 251
- Michalski, A.¹

8
- 2242483418
- (1984) J. Vac. Sci. Technol. B , vol.2 , pp. 781
- Beyers, R.¹ Sinclair, R.² Thomas, M.E.³

9
- 0023434695
- (1987) J. Solid State Chem. , vol.70 , pp. 318
- Knotek, O.¹ Leyendecker, T.²

10
- 0023349563
- (1987) J. Solid State Chem. , vol.68 , pp. 124
- Inamura, S.¹ Nobugai, K.² Kanamaru, F.³

11
- 0023703764
- (1988) J. Vac. Sci. Technol. B , vol.6 , pp. 2158
- Penttinen, I.¹ Molarius, J.M.² Korhonen, A.S.³ Lappalainen, R.⁴

12
- 0027677431
- (1993) Surf. Coat. Technol. , vol.59 , pp. 187
- Baumvol, I.J.R.¹ Stedile, F.C.² Schreiner, W.H.³ Freire F.L., Jr.⁴ Schröer, A.⁵

13
- 0003705428
- ASM International, Materials Park, OH
- (1995) Handbook of Ternary Alloy Phase Diagrams , vol.4
- Villars, P.¹ Prince, A.² Okamoto, H.³

14
- 0003720630
- McGraw-Hill, New York
- (1985) Constitution of Binary Alloys, 2nd ed.
- Hansen, M.¹ Anderko, K.²

15
- 0003689862
- American Society for Metals, Metals Park, OH
- (1986) Binary Alloy Phase Diagrams
- Massalski, T.B.¹ Murray, J.L.² Bennett, L.H.³ Baker, H.⁴

16
- 0031122705
- (1997) J. Phys. IV , vol.7
- Takahashi, M.¹ Kanamaru, F.² Harada, M.³ Watanabe, I.⁴

17
- 4243875885
- in press
- Phys. Rev. B
- Schüler, A.¹ Oelhafen, P.²

18
- 0030401970
- (1996) Thin Solid Films , vol.290-291 , pp. 339
- Wuhrer, R.¹ Yeung, W.Y.² Phillips, M.R.³ Mc Credie, G.⁴

19
- 0032607006
- (1999) Appl. Phys. Lett. , vol.75 , pp. 630
- Smith, G.B.¹ Swift, P.D.²

20
- 0003697328
- Wiley, New York
- (1981) Solar Selective Surfaces
- Agnihotri, O.P.¹ Gupta, B.K.²

21
- 0004893070
- (1996) SPIE conference

22
- 0032136015
- (1998) Sol. Energy Mater. Sol. Cells , vol.54 , pp. 19
- Berghaus, A.¹

23
- 33744538097
- (1972) Phys. Rev. B , vol.5 , pp. 4709
- Shirley, D.A.¹

24
- 0003860280
- Springer, New York
- (1996) Photoelectron Spectroscopy: Principles and Applications, 2nd ed. , pp. 144
- Hüfner, S.¹

25
- 0041742046
- (1976) J. Electron Spectrosc. Relat. Phenom. , vol.8 , pp. 129
- Scofield, J.H.¹

26
- 0018436046
- (1979) Surf. Interface Anal. , vol.1 , pp. 2
- Seah, M.P.¹ Dench, W.A.²

27
- 0004040706
- Academic, New York
- (1985) Handbook of Optical Constants of Solids I , pp. 547
- Palik, E.D.¹

28
- 0003688580
- Dover, New York
- (1991) Optical Properties of Thin Solid Films
- Heavens, O.S.¹

29
- 0003635006
- NBS, Gaithersburg, MD, JCPDS index No. 38-1420, International Center for Diffraction Data, Swarthmore, PA
- (1987) ICDD Grant-in-Aid
- Wong-Ng, W.¹ McMurdie, H.² Paretzkin, B.³ Hubbard, C.⁴ Dragoo, A.⁵

30
- 0003427458
- Addison-Wesley, Reading, MA
- (1978) Elements of X-Ray Diffraction, 2nd ed.
- Cullity, B.D.¹

31
- 0032476231
- (1998) Thin Solid Films , vol.332 , pp. 16
- Kirkpatrick, S.R.¹ Rohde, S.L.² Mihut, D.M.³ Kurruppu, M.L.⁴ Swanson, J.R.⁵ Thomson, D.⁶ Woollam, J.A.⁷

32
- 0000568466
- (1999) J. Appl. Phys. , vol.86 , pp. 346
- Kang, J.H.¹ Kim, K.J.²

33
- 0032136818
- (1998) Sol. Energy Mater. Sol. Cells , vol.54 , pp. 39
- Granquist, C.G.¹ Wittwer, V.²

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