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Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 408-415

Oxidation resistance of titanium-aluminium-silicon nitride coatings

(5) Vennemann, A a Stock, H R a Kohlscheen, J a Rambadt, S b Erkens, G b

a STIFTUNG INSTITUT FÜR WERKSTOFFTECHNIK (Germany)

b CemeCon AG (Germany)

Author keywords

Magnetron sputtering; Oxidation behaviour; TiAlN; TiAlSiN

Indexed keywords

ALUMINUM NITRIDE; BINDING ENERGY; CUTTING TOOLS; DIFFUSION; GLOW DISCHARGES; INTERFACES (MATERIALS); MACHINING; MAGNETRON SPUTTERING; MICROHARDNESS; OXIDATION RESISTANCE; OXYGEN; PARTIAL PRESSURE; SILICON NITRIDE; TITANIUM NITRIDE; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

GLOW DISCHARGE OPTICAL SPECTROSCOPY (GDOM);

COATINGS;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 18244429384 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00407-9 Document Type: Article

Times cited : (99)

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