Simulation of the transport of sputtered atoms and effects of processing conditions

Applied Surface Science

Volumn 254, Issue 18, 2008, Pages 5750-5756

  Settaouti, A ^a   Settaouti, L ^a  

^a UNIVERSITÉ DES SCIENCES ET DE LA TECHNOLOGIE D ORAN MOHAMED BOUDIAF   (Algeria)

Author keywords

Monte Carlo simulations; Sputtered particle transport; Sputtering

Indexed keywords

COLLISION AVOIDANCE; COMPUTER SIMULATION; DEPOSITION RATES; MATHEMATICAL MODELS; MONTE CARLO METHODS; SPUTTER DEPOSITION; SUBSTRATES;

SPUTTERED PARTICLE TRANSPORT; TRANSPORT PROCESS;

PARTICLES (PARTICULATE MATTER);

EID: 44349131461     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.03.042     Document Type: Article

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