Glow-discharge sputter deposition of Si films and fabrication of high-quality polycrystalline Si thin-film transistors

Journal of the Korean Physical Society

Volumn 48, Issue SUPPL. 1, 2006, Pages

  Serikawa, Tadashi ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Glass substrate; Glow discharge sputtering; Poly Si TFTs; Stainless steel

Indexed keywords

EID: 33644540480     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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