Monte Carlo simulation of the transport of atoms in DC magnetron sputtering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 243, Issue 2, 2006, Pages 313-319

  Mahieu, S ^a   Buyle, G ^a   Depla, D ^a   Heirwegh, S ^a   Ghekiere, P ^a   De Gryse, R ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

Magnetron sputtering; Monte Carlo simulation; Sputtered particle transport

Indexed keywords

ELECTRIC VARIABLES MEASUREMENT; MAGNETIC FLUX; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; SCREENING; TRANSPORT PROPERTIES;

FIRSOV SCREENING LENGTH; SPUTTER FLUX; SPUTTER PRESSURES; SPUTTERED PARTICLE TRANSPORT;

ATOMS;

EID: 30744445759     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.09.018     Document Type: Article

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