Condensation coefficients in plasma sputtering deposition

Journal of Physics D: Applied Physics

Volumn 40, Issue 7, 2007, Pages 2121-2123

  Brault, Pascal ^a   Thomann, Anne Lise ^a   Rozenbaum, Jean Philippe ^a  

^a UNIVERSITÉ D'ORLÉANS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CONDENSATION; OPTICAL EMISSION SPECTROSCOPY; PALLADIUM; PLASMA DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SUBSTRATES;

CONDENSATION COEFFICIENTS; PALLADIUM DEPOSITION; PLASMA SPUTTERING DEPOSITION;

SPUTTER DEPOSITION;

EID: 33947361215     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/7/039     Document Type: Article

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