Metal copper films deposited on cenosphere particles by magnetron sputtering method

Journal of Physics D: Applied Physics

Volumn 40, Issue 9, 2007, Pages 2894-2898

  Yu, Xiaozheng ^a,c   Xu, Zheng ^b   Shen, Zhigang ^a,c  

^a BEIHANG UNIVERSITY   (China)

^b GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS   (China)

^c Nanotechnology Industrialization Base of China   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER DEPOSITS; FIELD EMISSION; FILM GROWTH; INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRY; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY;

CENOSPHERE PARTICLES; SPUTTERING POWER; ULTRASONIC VIBRATING GENERATOR;

METALLIC FILMS;

EID: 34247467046     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/9/034     Document Type: Article

References (14)

1. Swann S 1988 Phys. Technol. 19 67
2. Karabacak T, Zhao Y-P, Wang G-C and Lu T-M 2001 Phys. Rev. B 64 085323
3. Karabacak T, Singh J P, Zhao Y-P, Wang G-C and Lu T-M 2003 Phys. Rev. B 68 125408
4. Kuo D H, Chien C H and Huang C H 2002 Thin Solid Films 420-421 47
5. Xiang Y, Chengbiao W, Yang L, Deyang Y and Tingyan X 2006 Plasma Sci. Technol. 8 337
6. Wu M-L, Qian W-D, Chung Y-W, Wang Y-Y, Wong M-S and Sproul W D 1997 Thin Solid Films 308-309 113
7. Richard A K 1996 Energitika 7 1
8. Akesson J, Seal S, Shukla S and Rahaman Z 2002 Adv. Mater. Process. 160 33
9. Cai C J, Shen Z G, Wang M Z, Ma S L and Xing Y S 2003 China Partic. 1 156
10. Shukla S, Seal S, Akesson J, Oder R, Carter R and Rahaman Z 2001 Appl. Surf. Sci. 182 35
11. Shukla S, Seal S, Rahaman Z and Scammon K 2002 Mater. Lett. 57 151
12. Zeng A X, Xiong W H and Xu J 2005 Mater. Lett. 59 524
13. Xu H F, Xu L, Gu N and Sun Z L 2003 J. Southeast Univ. (Engl. Edn) 19 8
14. Uplane M D and Pawar S H 1983 Solid State Commun. 46 847