A novel highly tunable butterfly-type MEMS capacitor

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 11 PART A, Issue , 2008, Pages 187-192

  Shavezipur, Mohammad ^a   Khajepour, Amir ^a   Hashemi, Seyed Mohammad ^b  

^a UNIVERSITY OF WATERLOO   (Canada)

^b RYERSON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC POTENTIAL; MEMS; NONLINEAR ANALYSIS; Q FACTOR MEASUREMENT; RESONATORS;

CAPACITANCE-VOLTAGE (C-V) RESPONSES; NUMERICAL MODELS; TUNABLE CAPACITORS; TUNABLE FILTERS;

CAPACITORS;

EID: 44349116608     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2007-42556     Document Type: Conference Paper

References (14)

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