A high Q, large tuning range MEMS capacitor for RF filter systems

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 33-41

  Borwick III, Robert L ^a   Stupar, Philip A ^a   DeNatale, Jeffrey ^a   Anderson, Robert ^a   Tsai, Chialun ^a   Garrett, Kathleen ^a   Erlandson, Robert ^b  

^a ROCKWELL SCIENTIFIC COMPANY   (United States)

^b ROCKWELL COLLINS   (United States)

Author keywords

Damping; Liquid damping; RF MEMS; Tunable capacitor; Tunable filters

Indexed keywords

CAPACITORS; DAMPING; ELECTRIC FILTERS; TUNING; UHF DEVICES;

TUNABLE CAPACITORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037439021     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00316-3     Document Type: Conference Paper

References (6)

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2. J. Yoon, C. Nguyen, A High-Q Tunable Micro-Mechanical Capacitor with Movable Dielectric for RF Applications, Technical Digest of the International Electron Devices Meeting, 2000, pp. 489-492.
3. Z. Feng, H. Zhang, W. Zhang, B. Su, K. Gupta, V. Bright, Y. Lee, MEMS-Based Variable Capacitor for Millimeter-Wave Applications, Technical Digest of Solid State Sensors and Actuators Workshop, Hilton Head Island, SC, USA, 4-8 June 2000, pp. 255-258.
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5. R. Borwick, P. Stupar, J. DeNatale, R. Anderson, C. Tsai, K. Garrett, A high-Q, large tuning range tunable capacitor for RF applications, in: Proceedings of MEMS 2002, Las Vegas, NV, USA, 20-24 January 2002, pp. 669-672.
6. J.J. Yao, S. Park, R. Anderson, I. DeNatale, A Low Power/Low Voltage Electrostatic Actuator for RF MEMS Applications, Technical Digest of Solid State Sensors and Actuators Workshop, Hilton Head Island, SC, USA, 4-8 June 2000, pp. 246-249.