Design and modelling of novel linearly tunable capacitors

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2006, Pages

  Shavezipur, Mohammad ^a   Khajepour, Amir ^a   Hashemi, Seyed Mohammad ^b  

^a UNIVERSITY OF WATERLOO   (Canada)

^b RYERSON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; DEFORMATION; ELECTROSTATIC ACTUATORS; MATHEMATICAL MODELS; MEMS; NONLINEAR SYSTEMS;

CAPACITANCE-VOLTAGE (C-V) CURVES; PULL-IN VOLTAGE; TUNABLE CAPACITORS; TUNING RANGES;

CAPACITORS;

EID: 85196480269     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2006-14765     Document Type: Conference Paper

References (11)

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