An isolated tunable capacitor with a linear capacitance-voltage behavior

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 833-836

  Tsai, C ^a   Stupar, P A ^a   Borwick, R L ^a   Pai, M ^b   DeNatale, J ^a  

^a ROCKWELL SCIENTIFIC COMPANY   (United States)

^b Discera Inc   (United States)

Author keywords

Capacitance; Capacitance voltage characteristics; Drives; Electrostatic actuators; Isolation technology; Springs; Switched capacitor circuits; Tunable circuits and devices; Tuning; Voltage

Indexed keywords

ACTUATORS; CAPACITORS; DRIVES; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; ELECTROSTATIC DEVICES; INTEGRATED CIRCUIT MANUFACTURE; MICROSYSTEMS; SOLID-STATE SENSORS; SPRINGS (COMPONENTS); TEMPERATURE; TRANSDUCERS; TUNING;

CAPACITANCE VOLTAGE; CAPACITANCE VOLTAGE CHARACTERISTIC; CIRCUIT DESIGNS; ISOLATION TECHNOLOGY; LOW-TEMPERATURE ADHESIVES; SWITCHED -CAPACITOR CIRCUITS; TUNABLE CAPACITORS; TUNABLE CIRCUITS AND DEVICES;

CAPACITANCE;

EID: 84944747313     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215603     Document Type: Conference Paper

References (5)

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3. J.J. Yao, S. Park, R. Anderson, J. DeNatale, "A Low Power/Low Voltage Electrostatic Actuator for RF MEMS Applications," Technical Digest of Solid State Sensors and Actuators Workshop, Hilton Head Island, SC, USA, 4-8 June 2000, pp. 246-249.
4. Jun Zou, Chang Liu, José E. Schutt-Ainé, Jinghong Chen and Sung-Mo Kang, "Development of a Wide Tuning Range MEMS Tunable Capacitor for Wireless Communication Systems," Technical digest of International Electron Devices Meeting, 2000, pp. 403-406.
5. C. Marxer, O. Manzardo, H. Herzig, R. Dandliker, N. Rooij, "An Electrostatic Actuator with Large Dynamic Range and Linear Displacement-Voltage Behaviour for a Miniature Spectrometer," Transducers '99, pp.786-789.