A novel linearly tunable MEMS variable capacitor

Journal of Micromechanics and Microengineering

Volumn 12, Issue 1, 2002, Pages 82-86

  Seok, Seonho ^a   Choi, Wonseo ^a   Chun, Kukjin ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CAPACITANCE; CHEMICAL MECHANICAL POLISHING; GLASS; MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; POLYSILICON; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; SINGLE CRYSTALS; SUBSTRATES;

GLASS-SILICON ANODIC BONDING TECHNIQUE; MICROELECTROMECHANICAL SYSTEM CAPACITOR; PYREX GLASS; SINGLE-CRYSTAL SILICON;

MOS CAPACITORS;

EID: 0036155573     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/1/313     Document Type: Article

References (7)

1. Micromachined devices for wireless communications
2. Frequency-selective MEMS for miniaturized communication devices
3. The effect of varactor nonlinearity on the phase noise of completely integrated VCOs
4. A micromachined variable capacitor for monolithic low noise VCOs
5. A micromachine-based RF low-noise voltage-controlled oscillator
6. MEMS designed for tunable capacitors
7. RF micromachined varactors with wide tuning range