A linearly tunable capacitor fabricated by the post-CMOS process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5836, Issue , 2005, Pages 642-648

  Dai, Ching Liang ^a   Liu, Mao Chen ^a   Li, Yu Ren ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

CMOS; Comb drive actuator; Post process; Tunable capacitor

Indexed keywords

ACTUATORS; CAPACITANCE; CMOS INTEGRATED CIRCUITS; ELECTRODES;

PARALLEL CAPACITORS; STANDARD CMOS;

CAPACITORS;

EID: 28444460724     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.607723     Document Type: Conference Paper

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