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Volumn 1, Issue , 1998, Pages 127-129
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MEMS designed for tunable capacitors
a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
CONTROLLABILITY;
INSERTION LOSSES;
INTEGRATED CIRCUIT LAYOUT;
MICROELECTROMECHANICAL DEVICES;
TUNING;
TUNABLE CAPACITORS;
CAPACITORS;
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EID: 0031630371
PISSN: 0149645X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (33)
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References (2)
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