Subsurface nanoindentation deformation of Cu-Al multilayers mapped in 3D by focused ion beam microscopy

Journal of Microscopy

Volumn 201, Issue 2, 2001, Pages 256-269

  Inkson, B J ^a   Steer, T ^a,b   Mobus G ^b   Wagner, T ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

^b MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

3D; Deformation mapping; FIB; Focused ion beam microscopy; Multilayers; Nanoindentation

Indexed keywords

ALUMINA; ALUMINUM ALLOYS; ALUMINUM OXIDE; BINARY ALLOYS; COPPER ALLOYS; FOCUSED ION BEAMS; IONS; MULTILAYERS; NANOCOMPOSITES; SINGLE CRYSTALS;

3D; 3D DATA SETS; DAMAGED REGION; DEFORMATION MAPPING; FIB; FOCUSED ION BEAM MICROSCOPY; MOLECULAR-BEAM EPITAXY; NANO INDENTATION; SUB-SURFACE DAMAGE; THREE-DIMENSIONAL ANALYSIS;

NANOINDENTATION;

ALUMINUM; COPPER; METAL COMPLEX;

ARTICLE; CHEMICAL INTERACTION; CHEMICAL STRUCTURE; CRYSTAL STRUCTURE; ELECTRON MICROSCOPY; PRIORITY JOURNAL; THREE DIMENSIONAL IMAGING;

EID: 0035092441     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.2001.00767.x     Document Type: Article

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