Failure of microelectromechanical systems subjected to impulse loads

International Journal of Solids and Structures

Volumn 45, Issue 2, 2008, Pages 497-512

  Kimberley, J ^a   Chasiotis, I ^a   Lambros, J ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Dynamic; Failure; Impact; Interface

Indexed keywords

DYNAMIC LOADS; FAILURE MODES; IMPACT TESTING; INTERFACES (MATERIALS); PULSED LASER APPLICATIONS; SUBSTRATES;

IMPULSIVE LOADS; LOADING CONDITIONS; PULSED LASER-LOADING;

MEMS;

EID: 44249115049     PISSN: 00207683     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijsolstr.2007.08.004     Document Type: Article

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