The effect of wafer curvature on x-ray rocking curves from gallium nitride films

Journal of Applied Physics

Volumn 103, Issue 9, 2008, Pages

  Moram, M A ^a   Vickers, M E ^a   Kappers, M J ^a   Humphreys, C J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL SYMMETRY; CRYSTALLINE MATERIALS; DEFECT DENSITY; DISLOCATIONS (CRYSTALS); GALLIUM NITRIDE; WAFER BONDING; X RAY ANALYSIS;

CRYSTALLINE QUALITY; FULL WIDTH AT HALF MAXIMUM (FWHM); WAFER CURVATURE; X-RAY ROCKING CURVES;

THIN FILMS;

EID: 43949103098     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2913514     Document Type: Article

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