Mosaic structure in epitaxial thin films having large lattice mismatch

Journal of Applied Physics

Volumn 82, Issue 9, 1997, Pages 4286-4295

  Srikant, V ^a   Speck, J S ^a   Clarke, D R ^a  

^a University of California at Santa Barbara   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4143071546     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366235     Document Type: Article

References (32)

1. H. A. Lu, L. A. Wills, and B. W. Wessels, Appl. Phys. Lett. 64, 2973 (1994).
2. V. Srikant, E. J. Tarsa, D. R. Clarke, and J. S. Speck, J. Appl. Phys. 77, 1517 (1995).
3. K. Nashimoto, D. K. Fork, and T. H. Geballe, Appl. Phys. Lett. 60, 1199 (1992).
4. E. J. Tarsa, M. De Graaf, D. R. Clarke, A. C. Gossard, and J. S. Speck, J. Appl. Phys. 73, 3276 (1993).
5. B. Heying, X. H. Wu, S. Keller, Y. Li, D. Kapolnek, B. Keller, S. P. DenBaars, and J. S. Speck, Appl. Phys. Lett. 68, 643 (1996).
6. R. F. Davis, T. W. Weeks, M. D. Bremser, and S. Tanaka, Solid State Commun. 41, 129 (1997).
7. D. Kapolnek, X. H. Wu, B. Heying, S. Keller, B. Keller, U. K. Mishra, S. P. DenBaars, and J. S. Speck, Appl. Phys. Lett. 67, 1541 (1995).
8. A. Abare, V. Srikant, S. P. DenBaars, and D. R. Clarke (unpublished).
9. M. Kasuga and M. Mochizuki, J. Cryst. Growth 54, 185 (1981).
10. V. Srikant, V. Sergo, and D. R. Clarke, J. Am. Ceram. Soc. 78, 1931 (1995).
11. D. K. Fork, F. Armani-Leplingrad, J. J. Kingston, and G. B. Anderson, in Thin Film for Integrated Optics, Mater. Res. Soc. Symp. Proc. edited by B. W. Wessels and D. M. Walba (MRS, Pittsburgh, PA, 1995), p. 189.
12. The rocking curves are measured by keeping a constant angle between the source and the detector (equal to twice the Bragg angle for the diffracting planes) and then rocking the substrate about the surface normal.
13. P. F. Fewster, X-ray and Neutron Diffraction: Theory and Applications, edited by A. Authier, S. Lagomarsino, and B. K. Tanner (Plenum, New York, 1996), p. 269.
14. V. Srikant, PhD thesis, University of California, Santa Barbara, 1995.
15. X. H. Wu, E. J. Tarsa, and J. S. Speck (unpublished).
16. E. Galdecka, Acta Crystallogr., Sect. A: Found. Crystallogr. 49, 106 (1993).
17. E. Galdecka, Acta Crystallogr., Sect. A: Found. Crystallogr. 49, 116 (1993).
18. Pseudo-Voigt function is a linear combination of a Gaussian and a Lorentzian function. For a more detailed description see Appendix.
19. The rocking curve measures a vertical slice of the two-dimensional distribution function shown schematically in Fig. 3(b).
20. The value of f used is the average of all of the rocking curves measured.
21. R. M. Sheldon, Introduction to Probability Models, 5th ed. (Academic, Boston, 1993).
22. F. A. Ponce, MRS Bull. 22, 51 (1997).
23. Some of these dislocations may account for the misfit strain between the subgrain and the substrate but they do not have to. For example, pure screw dislocations at the sub-grain/substrate interface, as depicted in Fig. 4(c), do not account for any lattice parameter misfit between the sub-grain and the substrate.
24. 24In this article we make use of the following terminology for convenience. The part of any dislocation lying at the sub-grain/substrate interface is referred to as the "misfit segment" whether it actually takes part in relieving the misfit strain between the film and the substrate or not. Similarly, the part of any dislocation threading through the film is referred to as a "threading segment."
25. 25F. R. N. Nabarro, Theory of Crystal Dislocation (Oxford University Press, Oxford, 1967).
26. The dislocations are expected to end at the sub-grain boundaries, edge of the film or react with dislocations from the same slip system or other slip systems.
27. G. G. Bentle and K. T. Miller, J. Appl. Phys. 38, 4248 (1967).
28. F. A. Ponce, D. Cherns, W. T. Young, and J. W. Steeds, Appl. Phys. Lett. 69, 770 (1996).
29. X. J. Ning, F. R. Chien, P. Pirouz, J. W. Yang, and M. Asif Khan, J. Mater. Res. 11, 580 (1996).
30. X. H. Wu, L. M. Brown, D. Kapolnek, S. Keller, B. Keller, S. P. DenBaars, and J. S. Speck, J. Appl. Phys. 80, 3228 (1996).
31. In addition, threading dislocations having a burgers vector lying in the [1123] direction, resulting from the interaction of dislocations having burgers vectors [0001] and [1120], have also been reported. However, it can be shown that such threading dislocations play no role in determining the misorientation between the film and the substrate.
32. T. Vasilos and E. M. Passmore, in Ceramic Microstructures, Their Analysis, Significance and Production, edited by R. M. Fulrath and J. A. Pask (1966), Chap. 17.