Microelectromechanical system device for calibration of atomic force microscope cantilever spring constants between 0.01 and 4 N/m

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1444-1449

  Cumpson, Peter J ^a   Hedley, John ^b   Clifford, Charles A ^a   Chen, Xinyong ^c   Allen, Stephanie ^c  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b NEWCASTLE UNIVERSITY   (United Kingdom)

^c UNIVERSITY OF NOTTINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC PROTEIN INTERACTIONS; LARGE-AREA TORSIONAL MECHANICAL RESONATORS; MICROFABRICATED ARRAYS; SPRING CONSTANTS;

ACOUSTIC NOISE; AIR; ATOMIC FORCE MICROSCOPY; BIOLOGICAL MEMBRANES; CALIBRATION; FINITE ELEMENT METHOD; NATURAL FREQUENCIES; OSCILLATIONS; PROTEINS; RESONATORS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; STIFFNESS; SURFACE TREATMENT; VIBRATIONS (MECHANICAL);

MICROELECTROMECHANICAL DEVICES;

EID: 4344708205     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1763898     Document Type: Conference Paper

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